A Study on the Design of Solenoid Coils for Enhancing the Performance of NEG(Non Evaporator Getter) Coating

This paper investigates the design for improving the efficiency of the electromagnetic coil used in Non-Evaporator Getter (NEG) coating. For the proposed NEG coating, we design a solenoid-type coil shape, which is commonly used and focuses on forming a high-density magnetic field inside. We propose a design method for an electromagnet that forms a magnetic field of at least 100 Gauss within a radius of 10 mm from the maximum center point inside the coil. For the research presented in this paper, we use the finite element analysis software Ansys Maxwell to design and analyze the model, derive optimal parameters, and verify the results through simulations.