Range Expansion Technology for Ring MEMS Gyroscopes Based on Drive Voltage Modulation

This paper proposes a method to control the sensitivity of a ring MEMS gyroscope by adjusting the driving control voltage via MEMS. The aim is to explore the relationship between the range of the ring MEMS gyroscope and the driving control voltage, establishing a mathematical model that correlates driving control voltage with sensitivity. By applying different driving voltages to the same gyroscope, the study evaluates the performance and range of the gyroscope. Experimental results demonstrate that lower driving voltages increase the gyroscope's range. At a driving voltage of 10.85 V, the gyroscope achieves a range of ±200°/s, a minimum resolution of 0.019°/s, and a nonlinearity of 22.37 ppm. At 1.46 V, the gyroscope range expands to ±1000°/s, with a minimum resolution of 0.05138°/s and a nonlinearity of 60.73 ppm. As the measurement range increased fivefold, the degradation in gyroscope performance was significantly less than the scale of range expansion. Compared to the gain in modulation detection circuitry, gyroscope performance was optimized across the entire operational range.