Design, Fabrication and Characterization of Disk Resonator Gyroscope with Vibration and Shock Resistance

This paper presents a comprehensive optimization of an outer frame anchor disk resonator gyroscope (DRG) with enhanced resistance to vibration and shock, achieved by increasing the resonant frequency of the tub and translation modes. Furthermore, the wineglass mode retains a high quality factor, enhancing sensitivity and reducing the angle random walk (ARW). The performance of the proposed DRG is analyzed using dynamic equations, and its structural parameters are optimized through finite element analysis (FEA). The prototype device was fabricated using a two-mask silicon-on-insulator (SOI) process on (100) single-crystal silicon (SCS), which is better suited for complementary metal-oxide-semiconductor (CMOS) integration compared to (111) SCS. Experimental results show an ARW of 0.63°/h and a bias instability (BI) of 7.7°/h, with no significant performance degradation observed under vibrational environments, indicating potential for tactical-grade performance.