SF6- and CF-based plasmas interaction with Si and SiO2 at room and cryogenic temperature: Insights from molecular dynamics simulation”

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SPIRE - Sciences Po Institutional REpository
Published
2024-11-03
Primary Topic
Plasma Diagnostics and Applications
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article
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article

SF6- and CF-based plasmas interaction with Si and SiO2 at room and cryogenic temperature: Insights from molecular dynamics simulation”

E. Despiau-Pujo, G. Cunge, J. Romero Cedillo
SPIRE - Sciences Po Institutional REpository
Plasma Diagnostics and Applications
article

SF6- and CF-based plasmas interaction with Si and SiO2 at room and cryogenic temperature: Insights from molecular dynamics simulation”

E. Despiau-Pujo, G. Cunge, J. Romero Cedillo
article en

Abstract

No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Laboratoire des Technologies de la Microélectronique (FR)
Climate action
Openalex Percentile: Top 81%
Plasma Diagnostics and Applications
OpenAlex
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SF6- and CF-based plasmas interaction with Si and SiO2 at room and cryogenic temperature: Insights from molecular dynamics simulation” — E. Despiau-Pujo, G. Cunge, et al. · SPIRE - Sciences Po Institutional REpository (2024) | TGRS Research Map | TGRS