Scanning Micromirror Calibration Method Based on PSO-LSSVM Algorithm Prediction

Scanning micromirrors represent a crucial component in micro-opto-electro-mechanical systems (MOEMS), with a broad range of applications across diverse fields. However, in practical applications, several factors inherent to the fabrication process and the surrounding usage environment exert a considerable influence on the accuracy of measurements obtained with the micromirror. Therefore, it is essential to calibrate the scanning micromirror and its measurement system. This paper presents a novel scanning micromirror calibration method based on the prediction of a particle swarm optimization-least squares support vector machine (PSO-LSSVM). The objective is to establish a correspondence between the actual deflection angle of the micromirror and the output of the measurement system employing a regression algorithm, thereby enabling the prediction of the tilt angle of the micromirror. The decision factor (R2) for this model at the <i>x</i>-axis reaches a value of 0.9947.