Impact of cavity shape on thermal accelerometer parameters

This publication examines CFD (Computational Fluid Dynamics) analyses of a uniaxial accelerometer's behavior, focusing on convective heat transfer. A thermal convective accelerometer is a sensor that employs hot wire technology to quantify acceleration. The analytical modelling of sensitivity is inadequate for predicting sensitivity evolution as a function of acceleration in complex scenarios, particularly in temporal investigations; hence, CFD simulations have been employed. The sensitivity dependent on the sensor's form has been examined through simulations for accelerations exceeding 100,000 g. Furthermore, the bandwidth of the thermal accelerometer has been studied under various setups. The outcomes of these simulations will enhance sensor performance (cavity and wire dimensions, spacing between detectors and heater) to attain a measurement range of 100,000 g and a bandwidth of 10 kHz. • Development of thermal accelerometer for very high shock. • MEMS sensor with hot wire technology. • CFD study of the effect of different parameters, such as width dimension, on cavity shape. • Sensitivity and bandwidth study of a thermal accelerometer with a range of up to 100,000 g and 10 kHz.

Authors

Institutions

Publication Details

Journal
Micro and Nano Engineering
Published
2025-11-17
DOI
https://doi.org/10.1016/j.mne.2025.100331
Primary Topic
Laser and Thermal Forming Techniques
Type
article
Field-Weighted Citation Impact
0.00
Controls
|||
ALL TIME
JAN
FEB
MAR
APR
MAY
JUN
JUL
AUG
SEP
OCT
article

Impact of cavity shape on thermal accelerometer parameters

Valentin Toulmé
Micro and Nano Engineering
Laser and Thermal Forming Techniques
article

Impact of cavity shape on thermal accelerometer parameters

Valentin Toulmé
article en

Abstract

This publication examines CFD (Computational Fluid Dynamics) analyses of a uniaxial accelerometer's behavior, focusing on convective heat transfer. A thermal convective accelerometer is a sensor that employs hot wire technology to quantify acceleration. The analytical modelling of sensitivity is inadequate for predicting sensitivity evolution as a function of acceleration in complex scenarios, particularly in temporal investigations; hence, CFD simulations have been employed. The sensitivity dependent on the sensor's form has been examined through simulations for accelerations exceeding 100,000 g. Furthermore, the bandwidth of the thermal accelerometer has been studied under various setups. The outcomes of these simulations will enhance sensor performance (cavity and wire dimensions, spacing between detectors and heater) to attain a measurement range of 100,000 g and a bandwidth of 10 kHz. • Development of thermal accelerometer for very high shock. • MEMS sensor with hot wire technology. • CFD study of the effect of different parameters, such as width dimension, on cavity shape. • Sensitivity and bandwidth study of a thermal accelerometer with a range of up to 100,000 g and 10 kHz.

Micro and Nano EngineeringVol. 29
Centre National de la Recherche Scientifique (FR), Université de Montpellier (FR), Université de Lille (FR), Centre des Matériaux (FR), Institut d'Electronique, de Microélectronique et de Nanotechnologie (FR), Institut d'Électronique et des Systèmes (FR), Université Polytechnique Hauts-de-France (FR), École Centrale de Lille (FR)
Affordable and clean energy
Openalex Percentile: Top 100%
Laser and Thermal Forming Techniques
AI Navigator

Ask Laika to Summarize, Analyze, and Connect papers live on the map.

Summarize Papers & Methodologies

Extract key findings, datasets, and comparative methods across publications.

Benchmark Rankings & Visual Analytics

Rank top research institutions, authors, funders, topics, and journals by Field-Weighted Citation Impact (FWCI) and paper volume with instant charts.

Connect Distant Disciplines

Bridge topological clusters on the map to find hidden collaborative intersections.