Impact of cavity shape on thermal accelerometer parameters
This publication examines CFD (Computational Fluid Dynamics) analyses of a uniaxial accelerometer's behavior, focusing on convective heat transfer. A thermal convective accelerometer is a sensor that employs hot wire technology to quantify acceleration. The analytical modelling of sensitivity is inadequate for predicting sensitivity evolution as a function of acceleration in complex scenarios, particularly in temporal investigations; hence, CFD simulations have been employed. The sensitivity dependent on the sensor's form has been examined through simulations for accelerations exceeding 100,000 g. Furthermore, the bandwidth of the thermal accelerometer has been studied under various setups. The outcomes of these simulations will enhance sensor performance (cavity and wire dimensions, spacing between detectors and heater) to attain a measurement range of 100,000 g and a bandwidth of 10 kHz. • Development of thermal accelerometer for very high shock. • MEMS sensor with hot wire technology. • CFD study of the effect of different parameters, such as width dimension, on cavity shape. • Sensitivity and bandwidth study of a thermal accelerometer with a range of up to 100,000 g and 10 kHz.
Authors
- Valentin Toulmé
Institutions
- Centre National de la Recherche Scientifique (FR)
- Université de Montpellier (FR)
- Université de Lille (FR)
- Centre des Matériaux (FR)
- Institut d'Electronique, de Microélectronique et de Nanotechnologie (FR)
- Institut d'Électronique et des Systèmes (FR)
- Université Polytechnique Hauts-de-France (FR)
- École Centrale de Lille (FR)
Publication Details
- Journal
- Micro and Nano Engineering
- Published
- 2025-11-17
- DOI
- https://doi.org/10.1016/j.mne.2025.100331
- Primary Topic
- Laser and Thermal Forming Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00