Employing the pyroelectric effect in LiTaO₃ thin film for infrared detection of complex gases

Abstract In this paper, the lithium tantalite ( <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">LiTaO</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>3</mml:mn> </mml:mrow> </mml:msub> </mml:math> ) thin film has been employed as the highly sensitive element for infrared detection of compound (refrigerant) gases such as 1,1,1,2-Tetrafluoroethane ( <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">C</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>2</mml:mn> </mml:mrow> </mml:msub> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">H</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>2</mml:mn> </mml:mrow> </mml:msub> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">F</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>4</mml:mn> </mml:mrow> </mml:msub> </mml:math> ) and 1,1,1,2,3,3,3-Heptafluoropropane ( <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">C</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>3</mml:mn> </mml:mrow> </mml:msub> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">F</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>7</mml:mn> </mml:mrow> </mml:msub> <mml:mi mathvariant="normal">H</mml:mi> </mml:math> ). The <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">LiTaO</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>3</mml:mn> </mml:mrow> </mml:msub> </mml:math> thin film was subjected to the mid-infrared light from output transmission spectra of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">C</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>2</mml:mn> </mml:mrow> </mml:msub> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">H</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>2</mml:mn> </mml:mrow> </mml:msub> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">F</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>4</mml:mn> </mml:mrow> </mml:msub> </mml:math> as well as <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">C</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>3</mml:mn> </mml:mrow> </mml:msub> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">F</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>7</mml:mn> </mml:mrow> </mml:msub> <mml:mi mathvariant="normal">H</mml:mi> </mml:math> molecules used as sources. The technology for preparation of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">LiTaO</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>3</mml:mn> </mml:mrow> </mml:msub> </mml:math> thin film as well as detector design and manufacturing are presented. Particular attention was paid to production of conductive electrodes, including a very thin semitransparent <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:mi mathvariant="italic">Au</mml:mi> </mml:math> layer evaporated on the top surface of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">LiTaO</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>3</mml:mn> </mml:mrow> </mml:msub> </mml:math> pyroelectric material. Important characteristics of the <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">LiTaO</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>3</mml:mn> </mml:mrow> </mml:msub> </mml:math> based pyroelectric system are briefly discussed. Additionally, the design, construction, and performance of the gas chamber operating as a channel for gas sensor testing is briefly described. The pyroelectric open-circuit voltage generated in <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">LiTaO</mml:mi> </mml:mrow> <mml:mrow> <mml:mn>3</mml:mn> </mml:mrow> </mml:msub> </mml:math> was boosted with a signal processing circuit for selective high-sensitivity detection of compound gases at room temperature. The infrared (IR) filters such as titanium dioxide <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:mo stretchy="false">(</mml:mo> <mml:msub> <mml:mrow> <mml:mi mathvariant="normal">TiO</mml:mi> </mm