Defects in polysilicon channel: Insight from first principles and multi-scale modelling

• The electronic structure of grain boundaries significantly impacts TFT characteristics. • The exploration of atomistic details migration in multi-scale modelling is the focus here. • Inherent impurities in polysilicon strongly influence the figure of merit. • A thorough understanding of material properties entwined with a device is crucial for accurate modelling. With increasing demand for essential components in the field of electronic devices, enabling advancements in display technology, flexible electronics, and various industrial applications, thin-film transistors (TFTs) are significant. Their versatility and compatibility with low-temperature fabrication processes make them a vital element in advanced electronic systems. The use of polycrystalline silicon (Poly-Si) as the channel material is specific to TFT applications unlike single-crystal/epitaxial Si in high-performance integrated circuit transistors. Poly-Si is characterized by the presence of defects such as voids, grain boundaries (GBs), and dislocations, that exert detrimental influence on electrical conductivity and then on device performance. Understanding of these would help engineer the novel TFT devices with superior reliability. In this context, Fundamental properties of the GBs are calculated using density functional theory (DFT) and their impact on poly-Si TFTs performance and figures of merit is assessed using the Ginestra® simulation platform. To account the process contaminations, the impact of known lighter impurities on GBs is comprehensively studied. In this paper we show how material properties from DFT can be effectively virtualized to predict electronic device performance, enable fast and reliable evaluation of device sensitivity to material changes, and how outputs of this multi-scale modelling process agree with experiments.

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Publication Details

Journal
Solid-State Electronics
Published
2024-11-24
DOI
https://doi.org/10.1016/j.sse.2024.109031
Primary Topic
Semiconductor materials and devices
Type
article
Field-Weighted Citation Impact
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article

Defects in polysilicon channel: Insight from first principles and multi-scale modelling

Luca Larcher, Shruba Gangopadhyay, Tommaso Rollo, Rita Maji et al.
Solid-State Electronics
Semiconductor materials and devices
article

Defects in polysilicon channel: Insight from first principles and multi-scale modelling

Luca Larcher, Shruba Gangopadhyay, Tommaso Rollo, Rita Maji, Elena Degoli, Milan Pešić, F. Nardi, Eleonora Luppi
article en

Abstract

• The electronic structure of grain boundaries significantly impacts TFT characteristics. • The exploration of atomistic details migration in multi-scale modelling is the focus here. • Inherent impurities in polysilicon strongly influence the figure of merit. • A thorough understanding of material properties entwined with a device is crucial for accurate modelling. With increasing demand for essential components in the field of electronic devices, enabling advancements in display technology, flexible electronics, and various industrial applications, thin-film transistors (TFTs) are significant. Their versatility and compatibility with low-temperature fabrication processes make them a vital element in advanced electronic systems. The use of polycrystalline silicon (Poly-Si) as the channel material is specific to TFT applications unlike single-crystal/epitaxial Si in high-performance integrated circuit transistors. Poly-Si is characterized by the presence of defects such as voids, grain boundaries (GBs), and dislocations, that exert detrimental influence on electrical conductivity and then on device performance. Understanding of these would help engineer the novel TFT devices with superior reliability. In this context, Fundamental properties of the GBs are calculated using density functional theory (DFT) and their impact on poly-Si TFTs performance and figures of merit is assessed using the Ginestra® simulation platform. To account the process contaminations, the impact of known lighter impurities on GBs is comprehensively studied. In this paper we show how material properties from DFT can be effectively virtualized to predict electronic device performance, enable fast and reliable evaluation of device sensitivity to material changes, and how outputs of this multi-scale modelling process agree with experiments.

Solid-State ElectronicsVol. 223
University of Modena and Reggio Emilia (IT), Centre National de la Recherche Scientifique (FR), Piaggio (Italy) (IT), Applied Materials (United States) (US), Sorbonne Université (FR), Istituto Nanoscienze (IT), Laboratoire de Chimie Théorique (FR), Re Lab (Italy) (IT)
Openalex Percentile: Top 81%
Semiconductor materials and devices
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