Parametric Analysis of Geometrically Similar ICP Discharges in Argon
A self-consistent model of inductively coupled plasma (ICP) discharge in argon describing the main plasma parameters at medium and high pressures was formulated in the work. Numerical calculations were carried out in a wide range of discharge conditions. Deviations from the fulfillment of similarity laws for some parameters for geometrically similar discharge tubes are shown.
Authors
- A. И. Сайфутдинов (ORCID: https://orcid.org/0000-0003-4776-3657)
- С. С. Сысоев (ORCID: https://orcid.org/0000-0001-7458-4828)
- I G Dautov (ORCID: https://orcid.org/0009-0000-4256-0215)
- А. А. Сайфутдинова (ORCID: https://orcid.org/0009-0006-7946-6445)
- F. R. Gatiyatullin
- T. Kh. Baykhanov
Institutions
- St Petersburg University (RU)
- Kazan State Technical University named after A. N. Tupolev (RU)
Publication Details
- Journal
- High Energy Chemistry
- Published
- 2024-11-23
- DOI
- https://doi.org/10.1134/s0018143924700917
- Citations
- 2
- Primary Topic
- Plasma Diagnostics and Applications
- Type
- article
- Field-Weighted Citation Impact
- 0.42