Analysis of Plasmochemical Processes in a Glow Discharge in Argon with Small Impurities of Methane at Low Pressure

The work carried out numerical calculations to study the dynamics of plasma-chemical processes in a glow discharge in argon with small admixtures of methane CH4 at low pressures. The dynamics of changes in the main conversion products and various types of ions in the process of establishing a discharge are presented. It is shown that the time it takes for the conversion products to reach a stationary regime is about t = 8 s. The main products of methane conversion in steady state are atomic hydrogen, as well as atomic and molecular carbon.