Oxidation behavior of TiB2–SiC nanocomposite coatings deposited by magnetron sputtering

TiB2 and TiB2-SiC coatings were deposited by magnetron sputtering using pure TiB2 targets and TiB2-20 mol. % SiC composite targets, and their high-temperature oxidation behavior in air was investigated. The addition of SiC transformed the TiB2 coating from a columnar microstructure to a densely nanocrystalline structure. After air annealing at 500 °C, a small amount of B2O3 oxide scales began to form on the surface of T20S. As the annealing temperature increased, the T0S coating developed loose B2O3 and TiO2 oxide layers and was completely oxidized at 1000 °C. In contrast, the dense B2O3 and amorphous borosilicate passivation layer in the T20S coating inhibited oxygen diffusion, delaying complete oxidation until annealing at 1100 °C.

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Publication Details

Journal
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Published
2024-11-21
DOI
https://doi.org/10.1116/6.0004075
Primary Topic
Advanced ceramic materials synthesis
Type
article
Field-Weighted Citation Impact
0.00

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article

Oxidation behavior of TiB2–SiC nanocomposite coatings deposited by magnetron sputtering

Y. Wu, Qizhong Li, Rong Tu, Takashi Goto
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Advanced ceramic materials synthesis
article

Oxidation behavior of TiB2–SiC nanocomposite coatings deposited by magnetron sputtering

Y. Wu, Qizhong Li, Rong Tu, Takashi Goto
article en

Abstract

TiB2 and TiB2-SiC coatings were deposited by magnetron sputtering using pure TiB2 targets and TiB2-20 mol. % SiC composite targets, and their high-temperature oxidation behavior in air was investigated. The addition of SiC transformed the TiB2 coating from a columnar microstructure to a densely nanocrystalline structure. After air annealing at 500 °C, a small amount of B2O3 oxide scales began to form on the surface of T20S. As the annealing temperature increased, the T0S coating developed loose B2O3 and TiO2 oxide layers and was completely oxidized at 1000 °C. In contrast, the dense B2O3 and amorphous borosilicate passivation layer in the T20S coating inhibited oxygen diffusion, delaying complete oxidation until annealing at 1100 °C.

Journal of Vacuum Science & Technology A Vacuum Surfaces and FilmsVol. 42(6)
Wuhan University of Technology (CN), Chaozhou Central Hospital (CN)
Major Projects of Guangdong Education Department for Foundation Research and Applied Research, Overseas Expertise Introduction Project for Discipline Innovation, National Natural Science Foundation of China-Guangdong Joint Fund, National Key Transform Program
Openalex Percentile: Top 87%
Advanced ceramic materials synthesis
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