<i>In situ</i> hydrogen doping of titanium dioxide <i>via</i> PAALD for enhanced MIM diode performance in high-frequency applications
Metal–insulator–metal (MIM) diodes based on black titanium dioxide are fabricated and characterized for the first time by in situ hydrogen doping via plasma assisted atomic layer deposition (PAALD).
Authors
- Michal Bajcsy (ORCID: https://orcid.org/0000-0002-8103-4987)
- George Shaker (ORCID: https://orcid.org/0000-0002-1450-2138)
- Bersu Baştuğ Azer (ORCID: https://orcid.org/0000-0002-0344-9634)
- Mustafa Yavuz (ORCID: https://orcid.org/0009-0001-9179-9107)
- Ahmet Gülsaran (ORCID: https://orcid.org/0000-0002-0725-1991)
- Michael A. Pope (ORCID: https://orcid.org/0000-0002-5793-3392)
- Dogu Ozyigit (ORCID: https://orcid.org/0000-0002-2211-6683)
Institutions
- University of Waterloo (CA)
Publication Details
- Journal
- Journal of Materials Chemistry C
- Published
- 2024-11-21
- DOI
- https://doi.org/10.1039/d4tc04152f
- Citations
- 1
- Primary Topic
- Semiconductor materials and devices
- Type
- article
- Field-Weighted Citation Impact
- 0.21