Electron Cyclotron Resonance Plasma Studies Using the Second Cyclotron Harmonic Resonance

Microwave plasma (generation frequency 2.45 GHz, power 200–1000 W, pressure 0.2–10 mTorr) is excited and maintained in two main modes: (1) at continuous microwave power and low magnetic fields (B = 300–450 G) under a superdense (Ne > Ncr = 7.4 × 1010 cm−3) plasma and low plasma density (Ne < Ncr); and (2) in high magnetic fields (B = 750–1000 G), close to the ECR condition. The peculiarities of plasma generation under the ECR condition and at the second harmonic of cyclotron resonance are studied.