Design of a Slot Phase Shifter Using a Radio-Frequency Microelectromechanical Systems

Based on the existing waveguide-slot phase shifter design, an improved method is introduced to achieve better simulation results using RF MEMS switches. The performance of phase shifters utilizing RF MEMS switches is compared with those using p-i-n diodes. The results demonstrate that the phase shifter with RF MEMS switches provides more evenly spaced phase shifts across the frequency range of 8.5-10.5 GHz, avoiding phase overlap, which is a limitation observed in p-i-n diode-based phase shifters. This highlights the enhanced phase control and system efficiency achieved with RF MEMS switches.