Preparation Of VO<sub>2</sub> Thin Films On 6H-SiC Substrate By Magnetron Sputtering
Experimental results of vanadium dioxide film deposition on silicon carbide substrate are presented in this article. The study of the crystal structure and surface characteristics showed the high quality of the vanadium dioxide film.The obtained samples demonstrate a phase transition of more than 4 orders of magnitude and IR radiation modulation by 22.3%.
Authors
- S. A. Khakhulin (ORCID: https://orcid.org/0000-0002-1780-2013)
- Andrey Altynnikov (ORCID: https://orcid.org/0000-0001-5932-2504)
- Andrey Komlev (ORCID: https://orcid.org/0000-0003-1017-5587)
- Roman Platonov (ORCID: https://orcid.org/0000-0002-4556-629X)
- Ilya Neustroev (ORCID: https://orcid.org/0009-0009-0375-766X)
- Andrey Tsymbalyuk (ORCID: https://orcid.org/0009-0002-4044-3167)
Institutions
- Saint Petersburg State Electrotechnical University (RU)
Publication Details
- Published
- 2024-10-17
- DOI
- https://doi.org/10.1109/eexpolytech62224.2024.10755528
- Primary Topic
- Transition Metal Oxide Nanomaterials
- Type
- article
- Field-Weighted Citation Impact
- 0.00