Formation of Barium Silicide Coatings by Vacuum Thermal Evaporation Methods

Options for the formation of thin films of BaSi silicide are the method of vacuum-thermal evaporation of materials, in particular thermal evaporation from a directly heated boat and from a crucible with electronic heating. It was found that Si and other coating components evaporate relatively easily from a graphite crucible. Research has determined the possibility of obtaining BaSi coatings; their composition and structure have been studied, as well as the possibility of protecting it from atmospheric influences with a thin Cr coating.