Simulated grating for absolute measuring the transfer function of 300mm aperture Fizeau interferometer
The simulated grating for absolute measuring the transfer function of large-aperture Fizeau interferometer is proposed, combining with the surface and homogeneity absolute measurement data, the simulated grating absolute surface data without aberration can be obtained more accurately to achieve the full aperture transfer function absolute measurement at all spatial frequency. A 300mm aperture Fizeau interferometer experimental results show that the absolute surface errors of the three flats are less than λ/20(PV) and λ/100(RMS), and the homogeneity measurement is better than 1*10<sup>-6</sup>. The optimized transfer function is better than 0.86 at 1 mm<sup>-1</sup> spatial frequency, which is a 10% improvement.
Authors
- Jincheng Zhuang
- Quanzhao Wang
- Xueyuan Li (ORCID: https://orcid.org/0000-0003-1112-5610)
- Sen Han (ORCID: https://orcid.org/0000-0003-2413-804X)
- Yanjun Wang (ORCID: https://orcid.org/0000-0001-6930-3980)
- Bo Zhang (ORCID: https://orcid.org/0000-0001-9172-698X)
- Ying Yang (ORCID: https://orcid.org/0009-0000-1341-8105)
- Songlin Zhuang (ORCID: https://orcid.org/0000-0003-3072-0634)
- Linji Ji
- Yuhang Shen
- Chengliang Fu
- Jiaqi Qin
- Liwei Zhang
Institutions
- University of Shanghai for Science and Technology (CN)
Publication Details
- Published
- 2024-11-20
- DOI
- https://doi.org/10.1117/12.3035907
- Primary Topic
- Optical measurement and interference techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00