High-accuracy mirror surface measurement using three scanning interferometric displacement sensors
High-accuracy mirror surface measurement using three scanning interferometric displacement sensors, with motion error calibrated, is proposed for X-ray mirror metrology. The motion error of the scanning displacement stage significantly affects the high-accuracy measurement of mirror surfaces during scanning. The influence of motion errors on surface height measurements is studied. After eliminating motion errors with a system comprising three scanning interferometric displacement sensors, the mirror surface can be obtained. The formula for the surface height solution is derived, and the residual error terms are analyzed. A method of error reduction using three reference mirrors to calibrate distance is proposed. The calibration and test experiments are conducted. Experimental results demonstrate the effectiveness of calibration, and the measurement repeatability is 7.39 nm.
Authors
- Guang‐Biao Zhou (ORCID: https://orcid.org/0000-0002-6327-2316)
- Xiaohao Dong (ORCID: https://orcid.org/0000-0002-5682-8320)
- Weizheng Lei
- Jie Wang (ORCID: https://orcid.org/0000-0002-9663-3165)
- Jiezhuo Wang
Institutions
- ShanghaiTech University (CN)
- Shanghai Advanced Research Institute (CN)
- Shanghai Institute of Applied Physics (CN)
- University of Chinese Academy of Sciences (CN)
Publication Details
- Published
- 2024-11-20
- DOI
- https://doi.org/10.1117/12.3045125
- Primary Topic
- Advanced Measurement and Metrology Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00