Optical constants of magnetron sputtered aluminum in the range 17–1300 eV with improved accuracy and ultrahigh resolution in the L absorption edge region
This work determines a new set of EUV/x-ray optical constants for aluminum (Al), one of the most important materials in science and technology. Absolute photoabsorption (transmittance) measurements in the 17–1300 eV spectral range were performed on freestanding Al films protected by carbon (C) layers, to prevent oxidation. The dispersive portion of the refractive index was obtained via the Kramers–Kronig transformation. Our data provide significant improvements in accuracy compared to previously tabulated values and reveal fine structure in the Al L1 and L2,3 regions, with photon energy step sizes as small as 0.02 eV. The implications of this work in the successful realization of EUV/x-ray instruments and in the validation of atomic and molecular physics models are also discussed.
Authors
- Franck Delmotte (ORCID: https://orcid.org/0000-0002-6769-6204)
- Catherine Burcklen (ORCID: https://orcid.org/0000-0002-7156-6357)
- Régina Soufli (ORCID: https://orcid.org/0000-0002-8152-3975)
- F. Salmassi
- Jennifer Alameda
- Eric M. Gullikson (ORCID: https://orcid.org/0000-0003-0337-7674)
Institutions
- Lawrence Livermore National Laboratory (US)
- Centre National de la Recherche Scientifique (FR)
- Lawrence Berkeley National Laboratory (US)
- Université Paris-Saclay (FR)
- Institut d’Optique Graduate School (FR)
- Laboratoire Charles Fabry (FR)
Publication Details
- Journal
- Journal of Applied Physics
- Published
- 2024-11-20
- DOI
- https://doi.org/10.1063/5.0233781
- Citations
- 2
- Primary Topic
- X-ray Spectroscopy and Fluorescence Analysis
- Type
- article
- Field-Weighted Citation Impact
- 1.22
Funders
- U.S. Department of Energy
- Centre National de la Recherche Scientifique
- Université Paris-Saclay
- Laboratory Directed Research and Development
- Lawrence Livermore National Laboratory
- Lawrence Berkeley National Laboratory