Formation of laser beams with a structured polarization distribution for the fabrication of spiral microreliefs in thin films of chalcogenide glasses

We propose a method of the formation of spiral-shaped microreliefs in thin films of chalcogenide glasses. The method is based on projection lithography using laser beams with a structured polarization distribution. To control the polarization of the initial laser beam, a spatial light modulator HOLOEYE LC 2012 is used. It is shown that changing the contrast of the mask images displayed on the modulator display affects the convexity/concavity of the formed profiles. This approach can be effectively used for the direct laser fabrication of more complex nano-/microelements, as well as their arrays.