In-plane beam focusing via integrated photonic gradient-index subwavelength grating metalens

We present an in-plane beam converter scheme that can focus a large Gaussian slab mode into a tightly focused spot approximately hundreds of micrometers away from the chip facet. Our approach involves designing the modal expander that converts a photonic waveguide mode to a large Gaussian slab mode and engineering the two-dimensional (2D) gradient-index subwavelength grating arrays that modify modal wavefront to be focused as the beam propagates. The device is designed on a monolithic silicon nitride scheme, which is transparent at the visible wavelength regime and readily available for the complementary metal-oxide-semiconductor process. Our device can be utilized in various chip-scale photonic applications, especially involving biochemical species and target samples ranging from one to tens of micrometer scales.