Dwell time calculation for CCOS of x-ray focusing mirror mold based on ADMM algorithm

X-ray focusing mirrors are of significant value in the field of optical inspection. Their imaging quality requires highprecision reflective surface. This paper proposes a method for calculating dwell time based on the Alternating Direction Method of Multipliers (ADMM) in Computer Controlled Optical Surfacing (CCOS), suitable for correcting surface error of cylindrical mold used in X-ray focusing mirrors. Through mathematical modeling, and material removal model derivation, a dwell time calculation model based on linear equations is established and solved using the ADMM algorithm. Simulation results demonstrate that this method outperforms the traditional Least Squares QR Decomposition (LSQR) algorithm in terms of surface precision, convergence rate, and algorithmic efficiency.

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Published
2024-11-18
DOI
https://doi.org/10.1117/12.3052712
Primary Topic
Advanced Surface Polishing Techniques
Type
article
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article

Dwell time calculation for CCOS of x-ray focusing mirror mold based on ADMM algorithm

Kun Wang, Shuai Lv
Advanced Surface Polishing Techniques
article

Dwell time calculation for CCOS of x-ray focusing mirror mold based on ADMM algorithm

Kun Wang, Shuai Lv
article en

Abstract

X-ray focusing mirrors are of significant value in the field of optical inspection. Their imaging quality requires highprecision reflective surface. This paper proposes a method for calculating dwell time based on the Alternating Direction Method of Multipliers (ADMM) in Computer Controlled Optical Surfacing (CCOS), suitable for correcting surface error of cylindrical mold used in X-ray focusing mirrors. Through mathematical modeling, and material removal model derivation, a dwell time calculation model based on linear equations is established and solved using the ADMM algorithm. Simulation results demonstrate that this method outperforms the traditional Least Squares QR Decomposition (LSQR) algorithm in terms of surface precision, convergence rate, and algorithmic efficiency.

Tongji University (CN)
Openalex Percentile: Top 81%
Advanced Surface Polishing Techniques
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