Dwell time calculation for CCOS of x-ray focusing mirror mold based on ADMM algorithm
X-ray focusing mirrors are of significant value in the field of optical inspection. Their imaging quality requires highprecision reflective surface. This paper proposes a method for calculating dwell time based on the Alternating Direction Method of Multipliers (ADMM) in Computer Controlled Optical Surfacing (CCOS), suitable for correcting surface error of cylindrical mold used in X-ray focusing mirrors. Through mathematical modeling, and material removal model derivation, a dwell time calculation model based on linear equations is established and solved using the ADMM algorithm. Simulation results demonstrate that this method outperforms the traditional Least Squares QR Decomposition (LSQR) algorithm in terms of surface precision, convergence rate, and algorithmic efficiency.
Authors
- Kun Wang (ORCID: https://orcid.org/0000-0002-5757-9848)
- Shuai Lv (ORCID: https://orcid.org/0000-0002-9417-6861)
Institutions
- Tongji University (CN)
Publication Details
- Published
- 2024-11-18
- DOI
- https://doi.org/10.1117/12.3052712
- Primary Topic
- Advanced Surface Polishing Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00