Design and Control of Modular Compliant XY Positioning stage

The modular design and controller implementation of compliant XY stage having large motion range are presented.The design involves symmetric parallel kinematic configuration using compound parallelogram flexure module (CPM) with input-output decoupling properties. The architectural parameters are determined based on the performance metrics such as stiffness, resonance frequency and motion range etc. The FEA simulation predicts the range of motion of 12 mm along each working axes.A prototype is developed to assess the performances of the stage. The results exhibit the small deviation between the two working axes which reflects the better decoupled motions.The PID controller is implemented to achieve the accuracy of positioning with submicron resolution.