A versatile high-speed x-ray microscope for sub-10 nm imaging

We have developed a next-generation scanning x-ray microscope RASMI (RApid Scanning Microscopy Instrument) for high-throughput tomographic imaging. RASMI is installed at the hard x-ray nanoprobe beamline at NSLS-II and is capable of manipulating 1D multilayer Laue lenses (MLLs) and 2D optics (both zone plates and monolithically assembled 2D MLLs). The sample scanning stage utilizes line-focusing interferometry as an encoder while performing fly-scanning data acquisition. The system can be configured for both position- and time-triggering modes during fly-scanning. The microscope demonstrated a detector-limited data acquisition rate of 1.25 kHz during ptychography measurements. The initial x-ray results yielded a sample-limited resolution of ∼6 nm in 2D. RASMI can be adopted for in-vacuum applications and is a foundation for the next-generation scanning microscopy systems to be developed and commissioned at NSLS-II.

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Publication Details

Journal
Review of Scientific Instruments
Published
2024-11-01
DOI
https://doi.org/10.1063/5.0225904
Citations
2
Primary Topic
Advanced X-ray Imaging Techniques
Type
article
Field-Weighted Citation Impact
1.22

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A versatile high-speed x-ray microscope for sub-10 nm imaging

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article en
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Abstract

We have developed a next-generation scanning x-ray microscope RASMI (RApid Scanning Microscopy Instrument) for high-throughput tomographic imaging. RASMI is installed at the hard x-ray nanoprobe beamline at NSLS-II and is capable of manipulating 1D multilayer Laue lenses (MLLs) and 2D optics (both zone plates and monolithically assembled 2D MLLs). The sample scanning stage utilizes line-focusing interferometry as an encoder while performing fly-scanning data acquisition. The system can be configured for both position- and time-triggering modes during fly-scanning. The microscope demonstrated a detector-limited data acquisition rate of 1.25 kHz during ptychography measurements. The initial x-ray results yielded a sample-limited resolution of ∼6 nm in 2D. RASMI can be adopted for in-vacuum applications and is a foundation for the next-generation scanning microscopy systems to be developed and commissioned at NSLS-II.

Review of Scientific InstrumentsVol. 95(11)
Brookhaven National Laboratory (US), National Synchrotron Light Source II
U.S. Department of Energy, City University of New York, Office of Science, Basic Energy Sciences, Brookhaven National Laboratory
Affordable and clean energy
Openalex Percentile: Top 20%
Advanced X-ray Imaging Techniques
1.22
DOIOpen Access PDFOpenAlex
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