Performance simulation and analysis of integrated optical gyroscope resonator structure

Gyroscope is a sensor that measures angular velocity, which is widely used in precision guidance, deep-sea operations, unmanned driving, etc. Currently, the gyroscope is moving towards the trend of compactness, high accuracy, high reliability and low cost, and the resonance integrated optical gyroscope is expected to be a preferred choice for the next generation of optical gyroscopes. In this paper, the finite element method is used for modeling and numerical simulation of silicon-based optical waveguide micro-ring resonator, a sensitive unit of resonant integrated optical gyroscope, in two-dimensional and three-dimensional, to research the effect of structural parameters of the resonator on its performance. Simulation results show that the free spectral width of the Si-based optical waveguide micro-ring decreases with increasing radius. The resonant depth of the micro-ring increases with the coupling spacing in a certain range, but it decreases with the coupling spacing beyond the critical coupling. In addition, the quality factor of the micro-ring resonator increases with the increase of radius. The research in this paper lays the foundation for performance optimization of the resonator.