The active alignment technology for off-axis three-mirror optical system

The off-axis three-mirror optical system is a typical class of off-axis systems. In order to ensure excellent imaging quality in the full field of view, the alignment process involves multiple components with multiple degrees of freedom which is difficult and challenging. This article focuses on the research of automatic adjustment technology for the off-axis three-mirror optical system. By quantitatively studying the relationship between component misalignment and aberrations, we aim to explore alignment method for this type of system, providing effective and reliable methods for active adjustment. The method studied in this paper has been verified on an off-axis three-mirror optical system, achieving a full-field RMS better than [email protected], reaching the diffraction limit.