Low-G In-Plane Multi-Directional MEMS Inertial Switch With Multiple Acceleration Thresholds

Abstract This paper reports a low-g in-plane MEMS inertial switch with multiple acceleration thresholds in multiple sensing directions. Designed for essential monitoring, this device targets low-g accelerations for health and safety applications. The device design utilizes the standard silicon-on-insulator micromachining process (SOIMUMPs) to simplify both fabrication and packaging. Through extensive testing, we demonstrate the switch ability to detect accelerations ranging from 45g to 88g. Despite minor discrepancies due to fabrication imperfections, the experimental results closely match the finite-element simulation results.