Study of the effect of CdCl2 introduction on the high temperature activation treatment of CdTe:As polycrystalline thin films

V-doped CdTe polycrystalline films can achieve both doping activation and defect passivation by high-temperature CdCl2 heat treatment, but this requires simultaneous modulation of the amount of CdCl2 introduced to obtain high-quality films. It is found that increasing the CdCl2 introduction does not change the physical phase structure and lattice constant of CdTe:As thin films, but promotes grain recrystallisation, and can promote the formation of A-center, and inhibit the formation of Cd vacancy (VCd) defects, as well as the formation of deep energy level defects. The results provide guidance for the improvement of high-temperature CdCl2 heat treatment of V-doped CdTe polycrystalline thin films.