Tantalum pentoxide on a fused quartz substrate platform for advanced photonic integrated circuits

Integrated photonics is a growing field in optics and microelectronics. In particular, tantalum pentoxide (Ta 2 O 5 ) is a promising material for advancing integrated photonic circuits. Ta 2 O 5 exhibits favorable characteristics, such as a high refractive index, wide transparency window, and low autofluorescence. Therefore, this study develops low-loss Ta 2 O 5 waveguide-based microring resonators optimized for telecom band operations on fused quartz substrates. The experiments demonstrated the excellent optical properties of Ta 2 O 5 for fabricating high-performance photonic structures. Moreover, we explored integrating diamond-inverted nanocones with Ta 2 O 5 waveguides for single-photon emission. The findings provide insights into using Ta 2 O 5 to develop single-photon emitters integrated into photonic circuits.