Development of Electron Beam Physical Vapor Deposition Coating Process for YSZ Material Using Domestic Equipment Technology

In this study, we developed domestic hardware and process technology related to EB-PVD(Electron Beam Physical Vapor Deposition) technology and succeeded in manufacturing YSZ(Yttria Stabilized Zirconia) coating with a columnar structure.The columnar structure of the EB-PVD coating changes sensitively depending on the surface roughness and movement of the substrate during the process.The roughness(Ra less than 0.1 to 4 m) and rotation speed(0~360 /s) of the substrate for the coin-shaped test specimen were confirmed.The microstructure was obtained according to the variable(360 /s) and angle(0, 30 ).As a result, when the roughness of the substrate surface was Ra 0.1 m or less and the rotation speed was 300 /s, a process with a uniform column structure and the best straightness was derived.In addition, based on the process data obtained in this study, we succeeded in producing a prototype of EB-PVD coating on the turbine blade shape.The average thickness of YSZ deposited on the airfoil was about 158 , and deviations were within 10 , resulting in a uniform coating. (EB-PVD: Electon-Beam Physical Vapor Deposition) , YSZ(Yttria-stabilized zirconia) .EB-PVD (Ra 0.1~4 ), (0~360 /s) (0, 30 ) . , Ra 0.1 300 /s .