The converter-load interaction in pulsed magnetron sputtering - a behavioral modelling approach

The magnetron sputtering thin film deposition process has been significantly advanced by the application of pulsed power technology. The paper proposes a behavioral model of the magnetron discharge that can be used to study the interaction between the pulsed discharge and the driving power electronic converter. The underlying physical phenomena have been investigated based on the literature, and practical measurement results have been qualitatively reproduced by pSpice simulation using the proposed model in case of a pulsed power supply based on inductive energy storage.