High-power 808nm VCSEL arrays for Nd:YAG pumping

High power large-scale single junction 808nm VCSEL arrays were fabricated at a chip size of 5.1mm×6mm with regular 100µm thickness substrate and packaged on commercial AlN submounts. The CW optical power was tested up to 100W from a single chip with maximum PCE of 44% and slope efficiency of 1.2W/A. The QCW optical power was tested up to 270W from a single chip with maximum PCE of 50% and slope efficiency of 1.35W/A. This is one of the best performances for high power VCSEL chips for commercial delivery. Side-pumped Nd:YAG laser was designed with these VCSEL chips and experiment was proceeded. High optical-to-optical pumping efficiency of 45% was calculated and the implied Nd:YAG stored energy was up to joules level. These experiments showed great potential for the high power VCSEL chips for Nd:YAG laser pumping and also offered great possibility for volume production and commercial delivery in the near future.

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Published
2024-11-08
DOI
https://doi.org/10.1117/12.3054213
Citations
1
Primary Topic
Semiconductor Lasers and Optical Devices
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article
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High-power 808nm VCSEL arrays for Nd:YAG pumping

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article

High-power 808nm VCSEL arrays for Nd:YAG pumping

Chen Liang-hui, Y. G. Wang, Yang Li, Chongxian Yuan, Chuanchuan Li, Xin Wei
article en
1 citations

Abstract

High power large-scale single junction 808nm VCSEL arrays were fabricated at a chip size of 5.1mm×6mm with regular 100µm thickness substrate and packaged on commercial AlN submounts. The CW optical power was tested up to 100W from a single chip with maximum PCE of 44% and slope efficiency of 1.2W/A. The QCW optical power was tested up to 270W from a single chip with maximum PCE of 50% and slope efficiency of 1.35W/A. This is one of the best performances for high power VCSEL chips for commercial delivery. Side-pumped Nd:YAG laser was designed with these VCSEL chips and experiment was proceeded. High optical-to-optical pumping efficiency of 45% was calculated and the implied Nd:YAG stored energy was up to joules level. These experiments showed great potential for the high power VCSEL chips for Nd:YAG laser pumping and also offered great possibility for volume production and commercial delivery in the near future.

Institute of Semiconductors (CN), University of Chinese Academy of Sciences (CN)
Affordable and clean energy
Openalex Percentile: Top 46%
Semiconductor Lasers and Optical Devices
0.21
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