Modeling and characterization of AlN-Based piezoelectric micromachined ultrasonic transducers

Abstract In this paper, we present the modeling and characterization of AlN-based piezoelectric micromachined ultrasonic transducers (PMUTs) dedicated to biomedical applications. Our study encompasses detailed analytical modeling of these transducers in both air and water environments. The model is confronted with finite element simulations that account for realistic issues such as imperfect clamping. To validate the model’s relevance, we compare its predictions with results from optical, electrical, and acoustical characterization. This comprehensive approach provides a robust framework for understanding PMUT behavior and facilitates efficient modeling of future devices.