Two dimensional beam forming and steering based on silicon nitride 1 × 32 optical phased array

Optical phased arrays (OPAs) offer a promising solution for integrating beam focusing and steering functionalities on a chip. In this work, we present a 32-antenna OPA fully integrated on a commercially available silicon nitride (SiN) platform, operating in the wavelength range of 1500 nm to 1630 nm. We detail the design of the circuit and its components, emphasizing the development of a highly efficient phase shifter that requires 130 mW for a 2 π phase shift. Testing the fabricated and assembled chip demonstrates a field of view of 24.28 ∘ × 9.4 ∘ and a beam resolution of 0.66 ∘ × 0.082 ∘ . To the best of our knowledge, these values are the highest reported for a fully SiN-based OPA at 1550 nm.