Self-assembly and dry etching of high- block copolymers in a microelectronics context

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SPIRE - Sciences Po Institutional REpository
Published
2024-10-01
Primary Topic
Block Copolymer Self-Assembly
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article
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article

Self-assembly and dry etching of high- block copolymers in a microelectronics context

M. Zelsmann
SPIRE - Sciences Po Institutional REpository
Block Copolymer Self-Assembly
article

Self-assembly and dry etching of high- block copolymers in a microelectronics context

M. Zelsmann
article en

Abstract

No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Laboratoire des Technologies de la Microélectronique (FR)
Openalex Percentile: Top 88%
Block Copolymer Self-Assembly
OpenAlex
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Self-assembly and dry etching of high- block copolymers in a microelectronics context — M. Zelsmann · SPIRE - Sciences Po Institutional REpository (2024) | TGRS Research Map | TGRS