Precise p-type and n-type doping of two-dimensional semiconductors for monolithic integrated circuits
The controllable fabrication of patterned p-type and n-type channels with precise doping control presents a significant challenge, impeding the realization of complementary metal-oxide-semiconductor (CMOS) logic using a single van der Waals material. However, such an achievement could offer substantial benefits by enabling continued transistor scaling and unprecedented interlayer interconnect technologies. In this study, we devise a precise method for two-dimensional (2D) semiconductor substitutional doping, which allows for the production of wafer-scale 2H-MoTe<sub>2</sub> thin films with specific p-type or n-type doping. Notably, we extend this approach to the synthesis of spatially selective doped 2H-MoTe<sub>2</sub> thin films via a one-step growth method, facilitating the monolithic integration of p-type and n-type semiconductor channels. Leveraging this advancement, we successfully fabricate a chip-sized 2D CMOS inverter array that demonstrates excellent device performance and yield. Collectively, these findings represent a significant stride towards the practical incorporation of 2D semiconductors in very large-scale integration technology.
Authors
- Pingfan Gu (ORCID: https://orcid.org/0000-0002-4203-794X)
- Yu Fei Pan (ORCID: https://orcid.org/0000-0001-9924-2111)
- Zemin Pan (ORCID: https://orcid.org/0009-0003-2306-5771)
- Yuqia Ran
- Jun He (ORCID: https://orcid.org/0000-0002-5998-5225)
- Yiwen Song
- Bo Han (ORCID: https://orcid.org/0000-0001-7042-3322)
- Tao Jian (ORCID: https://orcid.org/0009-0005-9319-8187)
- Qi Wang (ORCID: https://orcid.org/0000-0001-7129-1974)
- Yanping Li (ORCID: https://orcid.org/0000-0002-2776-8082)
- Yu Ye (ORCID: https://orcid.org/0000-0001-6046-063X)
- Xiaolong Xu (ORCID: https://orcid.org/0000-0003-2657-9658)
- Chendong Zhang (ORCID: https://orcid.org/0000-0002-4960-7036)
- Peng Gao (ORCID: https://orcid.org/0000-0003-2608-724X)
- Wanjin Xu
Institutions
- Beijing Institute of Technology (CN)
- Wuhan University of Technology (CN)
- Nantong University (CN)
- Peking University (CN)
- Wuhan University (CN)
- Collaborative Innovation Center of Quantum Matter (CN)
- Collaborative Innovation Center of Advanced Microstructures (CN)
- Shenyang Academy of Environmental Sciences (China) (CN)
Publication Details
- Journal
- Nature Communications
- Published
- 2024-11-07
- DOI
- https://doi.org/10.1038/s41467-024-54050-2
- Citations
- 58
- Primary Topic
- Graphene research and applications
- Type
- article
- Field-Weighted Citation Impact
- 6.79
Funders
- National Natural Science Foundation of China
- China Postdoctoral Science Foundation