Defect evolution and nitrogen incorporation in ion-implanted <i>β</i>-Ga2O3

Nitrogen plays an important role in the Ga2O3-based device fabrication since it demonstrates a deep acceptor behavior and it can be used as a compensation impurity. In the present work, we introduced N into the monoclinic β-Ga2O3 single crystals by ion implantation using different dose-rates. The thermal evolution of the structural and optical properties of the implanted samples was studied by combining Rutherford backscattering/channeling spectrometry and x-ray diffraction with photoluminescence spectroscopy. We demonstrate that crystal disorder in N-implanted β-Ga2O3 is a strong function of ion flux even for room temperature implantation. Unlike other implanted species, the defect annealing kinetics for N exhibit a distinct two-stage behavior, where the low-temperature stage (&amp;lt;400 °C) is characterized by a rapid defect annealing, whereas the radiation defects exhibit a very slow evolution at the elevated temperatures (&amp;gt;400 °C). These trends are discussed in the framework of the disorder stabilization induced by the incorporation of the implanted N atoms into the Ga2O3 lattice. The obtained results can be used to better understand the interaction between N and intrinsic defects as well as to push forward the development of β-Ga2O3-based electronic devices.