Multilayer Interference Mirrors with Nanoscale Metal Layers

interference mirrors based on “tantalum oxide/tantalum” multilayer structures with nanoscale metal layers were experimentally produced and studied. High-quality transparent tantalum oxide films were synthesized by reactive magnetron sputtering using a metal tantalum target with additional activation of the reactive gas by a dedicated inductively coupled plasma source. The alternation of metal and dielectric layers was ensured by opening/closing the oxygen flow using a mass-flow controller guided by a precision timer. It was shown in the experiments that by changing the thickness of the dielectric layers, it is possible to shift the passband and stopband within the wavelength range of 200-1000 nm, and changing the thickness of the metal layers allows you to adjust the width and depth of the passband. Based on the research results, it can be concluded that tantalum-based interference coatings can be used for practical applications as optical and decorative coatings due to their durability, weather resistance, and low absorption in the operating wavelength range.