Broadband optical antireflection metasurface design for F-P micro-optical accelerometers

The micro-optical accelerometer has the advantages of high sensitivity, miniaturization, and integration, which has attracted much attention. Its performance is closely related to parameters such as the intensity and bandwidth of the transmitted light of the optical resonator. Therefore, a novel, to our knowledge, single-layer all-dielectric antireflection structure based on metasurfaces is proposed. According to the quantitative relationship between the reflectivity and the diffraction component of the structure, the antireflection mechanism of the structure is explored. Then, by optimizing the structural parameters of the silicon surface unit, a broadband antireflection range from 415 to 3200 nm is realized, and the transmittance at 1550 nm can reach 99.8%. Finally, the designed metasurface structure is applied to the Fabry–Perot (F-P) micro-optical accelerometer, and the sensitivity is three times higher than that of the Al 2 O 3 antireflection film. This provides what we believe is a new idea for the integrated design of micro-optical accelerometer based on all-dielectric metasurfaces.