Optomechanical microgear cavity

We introduce a novel optomechanical microgear cavity for both optical and mechanical isotropic materials, featuring a single-etch configuration. The design leverages a conjunction of phononic and photonic crystal-like structures to achieve remarkable confinement of both optical and mechanical fields. The microgear cavity we designed in amorphous silicon nitride exhibits a mechanical resonance at 4.8 GHz, and whispering gallery modes in the near-infrared, with scattering-limited quality factors above the reported material limit of up to 10 7 . Notably, the optomechanical photoelastic overlap contribution reaches 75% of the ideal configuration seen in a floating ring structure.

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Publication Details

Journal
Journal of the Optical Society of America B
Published
2024-11-07
DOI
https://doi.org/10.1364/josab.543899
Primary Topic
Advanced MEMS and NEMS Technologies
Type
article
Field-Weighted Citation Impact
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article

Optomechanical microgear cavity

Thiago P. Mayer Alegre, Roberto O. Zurita, Gustavo S. Wiederhecker, Nick J. Schilder
Journal of the Optical Society of America B
Advanced MEMS and NEMS Technologies
article

Optomechanical microgear cavity

Thiago P. Mayer Alegre, Roberto O. Zurita, Gustavo S. Wiederhecker, Nick J. Schilder
article en

Abstract

We introduce a novel optomechanical microgear cavity for both optical and mechanical isotropic materials, featuring a single-etch configuration. The design leverages a conjunction of phononic and photonic crystal-like structures to achieve remarkable confinement of both optical and mechanical fields. The microgear cavity we designed in amorphous silicon nitride exhibits a mechanical resonance at 4.8 GHz, and whispering gallery modes in the near-infrared, with scattering-limited quality factors above the reported material limit of up to 10 7 . Notably, the optomechanical photoelastic overlap contribution reaches 75% of the ideal configuration seen in a floating ring structure.

Journal of the Optical Society of America BVol. 42(1)
Universidade Estadual de Campinas (UNICAMP) (BR)
Openalex Percentile: Top 82%
Advanced MEMS and NEMS Technologies
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Optomechanical microgear cavity — Thiago P. Mayer Alegre, Roberto O. Zurita, et al. · Journal of the Optical Society of America B (2024) | TGRS Research Map | TGRS