Optomechanical microgear cavity
We introduce a novel optomechanical microgear cavity for both optical and mechanical isotropic materials, featuring a single-etch configuration. The design leverages a conjunction of phononic and photonic crystal-like structures to achieve remarkable confinement of both optical and mechanical fields. The microgear cavity we designed in amorphous silicon nitride exhibits a mechanical resonance at 4.8 GHz, and whispering gallery modes in the near-infrared, with scattering-limited quality factors above the reported material limit of up to 10 7 . Notably, the optomechanical photoelastic overlap contribution reaches 75% of the ideal configuration seen in a floating ring structure.
Authors
- Thiago P. Mayer Alegre (ORCID: https://orcid.org/0000-0002-8999-8369)
- Roberto O. Zurita (ORCID: https://orcid.org/0000-0002-5592-517X)
- Gustavo S. Wiederhecker (ORCID: https://orcid.org/0000-0002-8216-6797)
- Nick J. Schilder
Institutions
- Universidade Estadual de Campinas (UNICAMP) (BR)
Publication Details
- Journal
- Journal of the Optical Society of America B
- Published
- 2024-11-07
- DOI
- https://doi.org/10.1364/josab.543899
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00