Research on the Configuration Optimization of All-Metal Micro Resonant Hemisphere

As the core component of the all-metal micro resonant gyroscope, the structural parameters and form and position errors of the resonator significantly influence its vibration characteristics, and consequently, the accuracy of the gyroscope. By establishing the finite element model of an ideal hemispherical resonator and optimizing the meshing method, we refined the frequency difference to 0.1 Hz, enhancing the accuracy of the simulation model. Through finite element simulation, we examined the impact of various structural parameters and processing errors on the natural frequencies of each mode. We analyzed how form and position errors, including shell thickness error, central axis error, equatorial plane error, and edge rectangular tooth position error, affect the frequency splitting of the resonator. We provided optimization suggestions for the structural parameters, ensuring frequency splitting variations of less than 1 Hz. Theoretical modeling and simulation analysis indicated that the primary factors influencing the vibration modes and frequency splitting are the rectangular tooth structure and shell thickness. Following the optimized parameters, the frequency splitting of the All-Metal Micro Resonant Hemisphere was reduced by an order of magnitude to 14 Hz, demonstrating that these optimized conditions can significantly enhance the resonator's performance.