Fabrication of Self-powered Silicon Microneedles for Transdermal Drug Delivery

Abstract Transdermal drug delivery has been widely studied in recent years. Compared with other methods of drug delivery, this method has many advantages, such as convenient, improving patient compliance and avoiding first-pass effect. However, the low efficiency of this method needs to be overcome. In this paper, a micro-invasive transdermal drug delivery mechanism with synergic coupling of microneedle force field and triboelectric field is proposed, which can enhance the efficiency of transdermal drug delivery and is easy to operate and use. First, a silicon solid microneedle array was fabricated by micromachining technology, and its size parameters could be flexibly adjusted. Second, a metal layer with microstructure was fabricated on the back of the microneedle by sputtering technology as the positive friction layer of the triboelectric structure. Last, the microneedle and the triboelectric structure were combined into a single composite structure by using FPC wires. The experimental results showed that the transdermal amount increased with the increase of external excitation force, frequency and the number of microneedle arrays. Under the same conditions, the skin penetration of the two mechanisms combined was 3-8 times higher than that of the single use.