On-Chip ESD Current Sensor for Nanosecond Oscillation Waveform Over Ampere Detecting

To analyze IC destruction and malfunction due to ESD (IEC61000-4-2), we proposed an on-chip current sensor that can accurately capture the entire ESD current waveform flowing into the IC that oscillates significantly for positive and negative in the nanosecond range. Measurement accuracy has improved by compensating for measurement errors caused by voltage overshoot in the nanosecond range of the current detection device. The ESD current waveform flowing into the IC is different from the standardization waveform, and a positive and negative oscillation waveform can come in, and we have designed to handle these polarities. This sensor sets a design window that does not incorrectly respond against noise that does not affect the system, and it only captures ESD currents of ampere or more. This sensor will become an important component for analyzing IC destruction and malfunction due to ESD.