Study of a Helicon Plasma by Emission Spectroscopy Methods

Diagnostics based on using the contactless emission spectroscopy method are discussed and measurements results in experiments with helicon plasma at an experimental device used for studies of the plasma processes in a helicon discharge are presented. Argon and helium were the working gases. The radial distribution of the electron temperature was measured as well as the radial distributions of the atom and ion temperatures in different cross sections of the plasma flow, and the temperature cross sections along the installation axis. The plasma ionization coefficient was calculated, and its dependence on the electron temperature was determined.