Formation of Active Particles in Methane, Nitrogen, and Oxygen Mixtures under Simultaneous Action of an Electric Field and an Electron Beam

The paper presents a computational and theoretical analysis of kinetic processes in methane, nitrogen, and oxygen mixtures for non-self-sustaining direct current discharges supported by an electron beam. Within an approximate approach, the kinetic coefficients in plasma under the simultaneous action of an applied electric field and an electron beam are determined. In a zero-dimensional (spatially homogeneous) approximation, the quasi-stationary composition of charged particles is calculated. The rate constants for generation of chemically active neutral particles of various types in plasma are calculated along with the energy efficiencies (G-factors) of the production of these particles depending on the magnitudes of the reduced electric field and the beam current. Similarity rules are proposed for the relation between the rates of production of active particles under the action of an electric field and an electron beam. It is shown that, by varying the applied field, it is possible to influence the composition of the produced hydrocarbon radicals.