Fabrication of Flexible Organic Field Effect Transistor Using Patterned Electrospray Deposition

ABSTRACT The electrospray deposition (ESD) method is a wet process that uses the solution spray formed by an electric field between the needle of a syringe containing the solution and a conductive substrate or an insulated electrode. In this study, we fabricated thin films based on 6,13‐bis(triisopropyl‐silylethynyl) pentacene (TIPS‐pentacene) formed by a new direct patterning ESD method. This method utilizes an electric field applied between the nozzle and patterned electrodes on the substrate. It enables the formation of patterns on materials such as plastic films. Moreover, this ESD method allows for the control of patterned film width using the voltage on a counter‐patterned electrode. These results demonstrate that the patterned TIPS‐pentacene film width can be controlled by controlling voltage. We fabricated a flexible organic field‐effect transistor (OFET) using this method and measured its static electrical characteristics.