Analysis and Performance Evaluation of a 14 nm Junctionless ⊥-FinFET Biosensor for Biological Species Detection

This paper presents a comprehensive study on the design, simulation, and performance analysis of a cutting-edge 14 nm junctionless ⊥-FinFET biosensor tailored for the detection of biological species. In this paper, on both sides of the fin, a 4nm of nanocavity is designed. This nano cavity has been formed between the gate to the fin for settling the biomolecules. Biomolecules are introduced into the device's cavity and nanocavity to facilitate immobilization. Subsequently, the performance characteristics of the device, including the switching ratio, and threshold voltage (V<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">th</inf>) shift, are meticulously investigated utilizing a TCAD (Technology Computer-Aided Design) device simulator tool. This analysis is conducted with the primary objective of detecting the presence of biomolecules. Different biomolecules such as Streptavidin, K=2.15, Aminopropyltriethoxysilane (APTES), and Keratin, K = 8 are considered for investigating the capability of biosensors. The electrical characteristics of the biomolecule examines and compared with without biomolecule and with neutral charge molecule, with positive charge, and with negative charge particle. The proposed device investigates the device's electrical characteristics, sensitivity, and detection limits, demonstrating its potential for highly efficient and accurate biosensing.