Corrosion Resistance and Low Temperature Pressure Sensor Design

This article introduces the development process of a low-temperature thin film pressure sensor. Using materials such as monocrystalline silicon film, kovar alloy nickel steel packaging components, low-temperature resistant SMT adhesive, silicone oil, cables, etc. By analyzing the chip structure and optimizing the packaging design, the corrosion resistance and low temperature resistance characteristics of the sensor have been improved. A low-temperature thin film pressure sensor with a range of 0.1~2MPa, a working temperature range of -40-85°C, and an accuracy better than 0.1%FS has been developed, which can meet the pressure measurement requirements of clean energy during tank transportation.