Sensitivity Analysis of SEM Parameters for Dimensional Calibration of Coaxial Air Lines

A method for processing SEM images to determine the diameter of the inner conductor of coaxial air lines is described. Additionally, a thorough sensitivity analysis of SEM parameters that may impact the value estimated is presented. One specific parameter stands out as the main contributor of systematic error that must be corrected to avoid excessive bias. This bias diminishes its influence as the device diameter gets smaller, which happens toward higher frequencies of operation.