Design of temperature and humidity control system for semiconductor manufacturing workshop

With the increasing demand for semiconductors in China and their continued development, there are extremely high requirements for temperature and humidity control in production environments. This paper focuses on the design of a temperature and humidity control system for semiconductor manufacturing workshops, aiming to build an efficient, lowenergy, and high-precision control system. Currently, domestic research on indoor controllers often suffers from shortcomings such as high energy consumption and low efficiency, making it difficult to meet the low-power control requirements within semiconductor factories. Therefore, this paper adopts a new approach that utilizes a combination of fan units, desiccant wheel units, and combined air handling units, which differs from traditional regulators. This new method adjusts temperature and humidity to further meet the requirements of low power consumption and high efficiency. The hardware section selects the STM32F103VE (System-on-Chip Microcontroller for 32-bit ARM Cortex-M Architecture) microcontroller to design the main circuit. Data is monitored using the DHT11 temperature and humidity sensor, and then a fuzzy PID (Proportional Integral Derivative) controller is adopted. By comparing the measured temperature with the setpoint, PWM (Pulse Width Modulation) signals within [0,1] are output to drive the circuit, Control of various fan groups working in combination, differing from traditional regulators. thereby achieving cooling and humidification effects. The system controls humidity between 40%RH (Relative humidity) and 50%RH and temperature between 20°°C and 24°C.